E15800 - SEMI E158 - 450 mmウェーハ搬送および保管用の工場ウェーハキャリア（450FOUP）とキネマティックカプリングの機械仕様 StdTpc-XML SEMI E15-0698 (technical revision)

SEMI E15-0698 (technical revision)

SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process

and controllers in semiconductor manufacturing equipment

• apex angles

キャリアセンシングパッド　 (5)

E15800 - SEMI E158 - 450 mmウェーハ搬送および保管用の工場ウェーハキャリア（450FOUP）とキネマティックカプリングの機械仕様 StdTpc-XML SEMI E15-0698 (technical revision)SEMI SEMI Physical Interfaces & Carriers Global Technical Committee20131223global Audits and Reviews Subcommittee20143www. semiviews. org www. semi. org2010720129 SEMI M74450 mm 450 mm 450 mm 450 mmKCP 3 Referenced SEMI Standards SEMI E144 Specification for RF Air Interface Between RFID Tags in Carriers and RFID Reader in Semiconductor Production and Material Handling Equipment SEMI M74 Specification for 450 mm Diameter Mechanical Handling Polished