E18400 - SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port StdTpc-Mask and Mask Equipment SEMI E171-0515 (technical revision)

SEMI E171-0515 (technical revision)

규약 및 표기법을 제공한다

The Guide does not apply to measurement systems used to control intermediate process steps during Si wafer manufacturing

本仕様は，global Silicon Wafer Committeeで技術的に承認されている。現版は，2010年8月27日 ，global Audits & Reviews Subcommitteeにて発行が承認された。2010年10月にwww

Although it is recognized that the materials of construction and the adhesives used to apply the label must be selected with this use in mind

E18400 - SEMI E184 - Specification for 300 mm Tape Frame FOUP Load Port StdTpc-Mask and Mask Equipment SEMI E171-0515 (technical revision)1 Purpose 1. 1 The purpose of this Specification is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment (SME), where a 300 mm Tape Frame FOUP can be loaded and unloaded. The intention of this Specification is to define a set of requirements and features to enable interoperability of load ports and Tape Frame FOUPs without limiting innovative solutions. 2 Scope 2. 1 The interface specification in this