F07900 - SEMI F79 - Guide for Gas Compatibility with Silicon Used in Gas Distribution Components StdTpc-Gas Particle Specifications reproducibility

reproducibility

and other components of FPD applications

org in March 2005

SEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers

the need to accurately determine roughness of polymer surfaces is important when evaluating fluid handling system components from various sources

F07900 - SEMI F79 - Guide for Gas Compatibility with Silicon Used in Gas Distribution Components StdTpc-Gas Particle Specifications reproducibilityThe purpose of this Guide is to identify resource information on compatibility of gases in contact with silicon in the wetted path of a gas delivery system operating at typical gas distribution system conditions. The information and conclusions provided are taken from published literature. References are cited. Recommendations are made based on the cited literature, although no opinion is made as to the validity of the cited literature. The