F11400 - SEMI F114 - Test Method for the Determination of Organic Contaminants Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components StdPbc-1114 SEMI M1-0215 (technical revision)

SEMI M1-0215 (technical revision)

This marking symbol is marked in a manner and location to avoid affecting the user patterning process

This Specification is intended to be used with the polished wafer specification (SEMI M1)

The notation is also intended to be used when logging SECS-II message communication traffic

SEMI MF154-1105 (technical revision)

F11400 - SEMI F114 - Test Method for the Determination of Organic Contaminants Present on Wetted Surfaces of Ultra High Purity Chemical Delivery Systems and Components StdPbc-1114 SEMI M1-0215 (technical revision)This Document defines a test method for determining organic compounds on the wetted surfaces of ultra high purity (UHP) chemical delivery systems and components. This Test Method is applicable to UHP chemical delivery systems and components. Examples of test samples include valves, regulators, filters, and mass flow controllers, tubing, weld fittings, and face seal fittings. This Test Method could also be used to determine the contamination