Matsusada ECA-5B6X2-LPoRyVI ESC Electrostatic Chuck HV Power Supply Working

Matsusada ECA-5B6X2-LPoRyVI ESC Electrostatic Chuck HV Power Supply WorkingMatsusada ECA 5B6X2 LPoRyVI ESC Electrostatic Chuck HV Power Supply Working Part No: ECA 5B6X2 LPoRyVI Model No: ECA Series Made in Japan This Matsusada ECA 5B6X2 LPoRyVI ESC Electrostatic Chuck is used working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Used Working, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 36"x24"x14" @ 35 lbs. Shipping Terms: All

Part No: AN16SPO-X

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Daughterboard Part No: EN2000414 This SoftSwitching Technologies 98-00023 Inverter Board PCB Rev

Inventory # A-10528

Estimated Packed Shipping Dimensions: L x W x H =  20"x20"x20" @ 34 lbs

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Inventory # 16623

Inventory # K-7117

Eprom 10: VEDIT2 12K V1

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Estimated Packed Shipping Dimensions: L x W x H = 56"x40"x75" @ 1200 lbs

Part No: PWR-24PS-16UW-12UW