F01400 - SEMI F14 - Guide for the Design of Gas Source Equipment Enclosures volume-C Similar requirements for other tools

Similar requirements for other tools are not defined here

このマーキングシンボルは，ユーザのパターンプロセスに影響しない方法と位置でマークされる。

including manufacturers of the basic test instrumentation to be used

SEMI F31-0313 (technical revision)

SEMI MF1630-1107 (Reapproved 0718)

F01400 - SEMI F14 - Guide for the Design of Gas Source Equipment Enclosures volume-C Similar requirements for other toolsThis standard was technically reapproved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on December 18, 1998. Initially available on www. semi. org February 1999; to be published June 1999. Originally published in 1993. Editorial changes were made to 3. 1. 1, 6. 2. 1, and 6. 2. 2. This document summarizes gas