Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment Ingestion-build-279162 BS EN 1202gives information on

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Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment Ingestion-build-279162 BS EN 1202gives information onWhat is ISO 21859 Plasma resistance of ceramic components about? ISO 21859 is an international standard on fine ceramics which covers a test method for plasma resistance of ceramic components in semiconductor manufacturing equipment. ISO 21859 specifies a test method for plasma resistance of ceramic components in semiconductor manufacturing equipment. It is applicable to ceramic components of plasma resistant components in dry etching chambers used in