Hitachi IL36-I PCB Card M-511E Microwave Plasma Etching System Working Spare Removed from a TEL Tokyo

Removed from a TEL Tokyo Electron Clean Track Lithius System This Advanet AGPCi8012 SBC Single Board Computer PCB Card is used working surplus

Range/Gas: MULTI-2

Part No: 84391030

Part No: C-100862A

Encoder Part No: ME-020-0

Hitachi IL36-I PCB Card M-511E Microwave Plasma Etching System Working Spare Removed from a TEL TokyoHitachi IL36 I PCB Card M 511E Microwave Plasma Etching System Working Spare Inventory # 12335, AA 3218 Part No: IL36 I Removed from a Hitachi M 511E Microwave Plasma Etching System This Hitachi IL36 I PCB Card is used working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Used Working, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 8"x8"x8" @ 10 lbs. Only