Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration Ingestion-build-96603 BS EN 16939 is a

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Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration Ingestion-build-96603 BS EN 16939 is a1 Scope This part of ISO 14644 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This part of ISO 14644 is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices. NOTE 1 For the purpose of this part of