Vacuum gauges. Definitions and specifications for quadrupole mass spectrometers Ingestion-build-239834 The massive electronics industry is

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Vacuum gauges. Definitions and specifications for quadrupole mass spectrometers Ingestion-build-239834 The massive electronics industry is1 Scope This International Standard defines terms relevant to quadrupole mass spectrometers (QMSs) and specifies the parameters required for specification by QMS manufacturers necessary for proper calibration and for maintaining the quality of partial pressure measurement. This International Standard applies to QMSs with an ion source of the electron impact ionization type. Such QMSs are designed for the measurement of atomic mass to charge ratios m z